عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .I587 1982
TK
7871
.
85
.
I587
1982
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
78286
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
آخر۲۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)40(
First Statement of Responsibility
Ion Implantation School, )2891, Berchtesgaden, Germany(
Title Proper
Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin, New York
Name of Publisher, Distributor, etc.
Springer-Verlag
Date of Publication, Distribution, etc.
1982
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xii, 372 p. : ill. ; 24 cm
SERIES
Series Title
Springer series in electrophysics, v. 01
GENERAL NOTES
Text of Note
Includes bibliographies and index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Ion implantation
Entry Element
، Semiconductor doping
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
I587
1982
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
editors, H. Ryssel and H. Glawischnig
AU renieH ,lessyR 1941-
AU .H ,ginhcsiwalG 1939-
CO International Conference on Ion Implantation: Equipment and Techniques) 4th: 2891: Berchtesgaden, Germany(
TI
SE
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
04
