عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .I5864 1983
TK
7871
.
85
.
I5864
1983
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
78293
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
آخر۲۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)40(
Title Proper
Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin, New York
Name of Publisher, Distributor, etc.
Springer-Verlag
Date of Publication, Distribution, etc.
1983
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
x, 556 p. : ill. ; 24 cm
SERIES
Series Title
Springer series in electrophysics, v. 11
GENERAL NOTES
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
، Ion implantation-- Congresses
Entry Element
، Semiconductor doping-- Congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
I5864
1983
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
editors, H. Ryssel and H. Glawischnig
AU renieH ,lessyR 1941-
AU .H ,ginhcsiwalG 1939-
CO International Conference on Ion Implantation: Equipment and Techniques) 4th:2891: Berchtesgaden, Germany(
SE
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
04
