عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .I578 1972
TK
7871
.
85
.
I578
1972
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
61104
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
آخر۲۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)40(
Title Proper
Ion implantation in semiconductors and other materials; )proceedings(
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
Plenum Press
Date of Publication, Distribution, etc.
]1973[
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xii, 657 p. illus. 26 cm
SERIES
Series Title
The IBM research symposia series
GENERAL NOTES
Text of Note
Includes bibliographical references
TOPICAL NAME USED AS SUBJECT
Entry Element
، Ion implantation-- Congresses
Entry Element
، Semiconductors-- Congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
I578
1972
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
AU
Entry Element
Edited by Billy L. Crowder
AU .L ylliB ,redworC ed
TI
SE
CORPORATE BODY NAME - SECONDARY RESPONSIBILITY
Entry Element
International Conference on Ion Implantation in Semiconductors and Other Materials, 3d, 1972, Yorktown Heights, N.Y.
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
04
