عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .E65 1986
TK
7871
.
85
.
E65
1986
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
89167
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
آخر۲۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)70(
Title Proper
Epitaxial silicon technology
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Orlando
Name of Publisher, Distributor, etc.
Academic Press
Date of Publication, Distribution, etc.
1986
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
viii, 328 p. : ill. ; 24 cm
GENERAL NOTES
Text of Note
Includes bibliographies and index
CONTENTS NOTE
Text of Note
Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev-- Silicon-on insulator epitaxy/Hon Wailam
TOPICAL NAME USED AS SUBJECT
Entry Element
، Semiconductors-- Design and construction
Entry Element
، Silicon crystals-- Growth
Entry Element
، Epitaxy
Entry Element
، Silicon-on-insulator technology
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
7871
.
85
.
E65
1986
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
edited by B. Jayant Baliga
AU tnayaJ .B ,agilaB 1948-
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
07
