عنوان
پدید آورنده
موضوع
رده
TA 1673 .L355 1983
TA
1673
.
L355
1983
کتابخانه
محل استقرار
OTHER STANDARD IDENTIFIER
Standard Number
76990
Standard Number
78220
Standard Number
92366
LANGUAGE OF THE ITEM
.Language of Text, Soundtrack etc
آخر۲۷
.Language of Text, Soundtrack etc
English
TITLE AND STATEMENT OF RESPONSIBILITY
General Material Designation
)40(
Title Proper
Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A.
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
New York
Name of Publisher, Distributor, etc.
North-Holland
Date of Publication, Distribution, etc.
1983
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiii, 298 p. : ill. ; 24 cm
SERIES
Series Title
Materials Research Society symposia proceedings, v. 71
GENERAL NOTES
Text of Note
"Sponsored by the Air Force Office of Scientific Research"--T.p. verso
Text of Note
Includes bibliographical references and indexes
TOPICAL NAME USED AS SUBJECT
Entry Element
، Lasers-- Industrial applications-- Congresses
Entry Element
، Semiconductors-- Congresses
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TA
1673
.
L355
1983
PERSONAL NAME - PRIMARY RESPONSIBILITY
Relator Code
TI
Entry Element
editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg
AU M .R ,doogsO
AU J .R .S ,kceurB
AU R .H ,grebssolhcS
AU ecroF riA ,setatS detinU
SE
LOCATION AND CALL NUMBER
Shelving Form of Title, Author, Author/Title
04
Shelving Form of Title, Author, Author/Title
04
Shelving Form of Title, Author, Author/Title
04
