عنوان
پدید آورنده
موضوع
رده
681,.2,E49
681
,.
2
,
E49
کتابخانه
محل استقرار
استان: Kohgiluye va Buyer ahmad ـ شهر: Yasuj
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
3540675825
English Book
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Mechanical microsensors
First Statement of Responsibility
M. Elwenspoek, R.J. Wiergerink
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Berlin ; New York
Name of Publisher, Distributor, etc.
Springer
Date of Publication, Distribution, etc.
,c2001
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
x, 295 p. ill. 25 cm.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
Includes bibliographical references and index.
TOPICAL NAME USED AS SUBJECT
Entry Element
Detectors- Design and construction
Entry Element
Microelectromechanical systems- Design and construction
Entry Element
Transducers
Entry Element
Silicon
Entry Element
Micromachining
DEWEY DECIMAL CLASSIFICATION
Number
681
,.
2
,
E49
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Elwenspoek, M.(Miko),1948-
PERSONAL NAME - SECONDARY RESPONSIBILITY
Entry Element
Wiegerink, Remco J.,1964-
Entry Element
Title
