عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0815514832
English Book
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Thin film materials technology
Other Title Information
sputtering of compound materials
First Statement of Responsibility
by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Norwich, NY
Name of Publisher, Distributor, etc.
William Andrew Pub.
Date of Publication, Distribution, etc.
2004
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiv, 531 p. ill.
SUMMARY OR ABSTRACT
Text of Note
Includes bibliographical references and index.
TOPICAL NAME USED AS SUBJECT
Entry Element
Cathode sputtering (Plating process)
Entry Element
Thin films
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Wasa, Kiyotaka.
