عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
1580535909
English Book
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Introduction to microelectromechanical systems engineering
First Statement of Responsibility
Nadim Maluf, Kirt Williams
EDITION STATEMENT
Edition Statement
2nd ed
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Boston
Name of Publisher, Distributor, etc.
Artech House
Date of Publication, Distribution, etc.
2004
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xx, 283 p. ill
SERIES
Series Title
Microelectromechanical systems series
SUMMARY OR ABSTRACT
Text of Note
Includes bibliographical references and index
TOPICAL NAME USED AS SUBJECT
Entry Element
Microelectromechanical systems
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
Maluf, Nadim
