عنوان
پدید آورنده
موضوع
رده
TK,7871.85,.D79,1984
TK
,
7871
.
85
,.
D79
,
1984
کتابخانه
محل استقرار
INTERNATIONAL STANDARD BOOK NUMBER
(Number (ISBN
0444869050
English Book
TITLE AND STATEMENT OF RESPONSIBILITY
Title Proper
Dry etching for microelectronics
First Statement of Responsibility
edited by Ronald A. Powell
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Amsterdam ; New York
Name of Publisher, Distributor, etc.
North-Holland Physics Pub. ; New York, N.Y. : Distributors for the USA and Canada, Elsevier Science Pub. Co.,
Date of Publication, Distribution, etc.
1984
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xi, 299 p. ill. 24 cm.
INTERNAL BIBLIOGRAPHIES/INDEXES NOTE
Text of Note
ng Includes index.
Text of Note
Bibliography: p. 223-294.
TOPICAL NAME USED AS SUBJECT
Entry Element
Semiconductors- Etching
Entry Element
Plasma etching
DEWEY DECIMAL CLASSIFICATION
Number
621
.
381
,.
73
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
,
7871
.
85
,.
D79
,
1984
PERSONAL NAME - SECONDARY RESPONSIBILITY
Entry Element
Powell, Ronald A.
Dates
Series: Materials processing, theory and practices ;v. 4.
