Microelectronic materials and processes :[proceedings of the NATO Aadvanced Study Institute on Microelectronic Materials and Proces Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986]&
First Statement of Responsibility
edited by R.A. Levy
.PUBLICATION, DISTRIBUTION, ETC
Place of Publication, Distribution, etc.
Dordrecht
Name of Publisher, Distributor, etc.
Kluwer Academic
Date of Publication, Distribution, etc.
c1989
PHYSICAL DESCRIPTION
Specific Material Designation and Extent of Item
xiv, 985 p. : ill. ; 25 cm.
TOPICAL NAME USED AS SUBJECT
Entry Element
Microelectronics--Materials--Congresses
Entry Element
Integrated circuits--Very large scale integration--Design and construc
LIBRARY OF CONGRESS CLASSIFICATION
Class number
TK
Book number
7874
Classification Record Number
.
N339
1986
PERSONAL NAME - PRIMARY RESPONSIBILITY
Entry Element
NATO Advanced Study Institute on Microelectronic Materials andyl atI ,occoiC lI : 6891( sessecorP )