ما بقی فیلدها | ،،،،1،1،8،0849312620،94141،01/04/1381،000،{1},94141{2},#50789{78},#BL{83},انگلیسی{175},#MEMS and NEMS #Sergey Edward Lyshevski{205},Boca Raton, FL CRC Press #2001{218},#461 p.: ill., 24 cm{224},Nano- and microscience, engineering, technology, and medicine series{247},#: systems, devices, and structures{314},#Includes bibliographical references and index{1255},Microelectromechanical systems | ||||||
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