عنوان
پدید آورنده
موضوع
رده
TA 2020 .H37 1990
TA
2020
.
H37
1990
کتابخانه
محل استقرار
0815512201
IR
10804
انگلیسی
IR
Handbook of plasma processing technology
[Book]
: fundamentals, etching, deposition, and surface interactions
/ edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood
Park Ridge, N.J., U.S.A.
: Noyes Publications
, 1990
xxiii, 523 p.
: ill.
; 25 cm
Materials science and process technology series
English
Includes bibliographical references
Plasma engineering
Semiconductors - Etching
Plasma etching
TA
2020
.
H37
1990
Cuomo, J. J.
Rossnagel, Stephen M.
Westwood, William D.(William Dickson), 1937-
Iran
University of Tehran. Library of Technical Camp 2
Old cataloging
p
BL
1
Y
