: [Proceedings of the NATO Advanced Study institute on Microelectronic materials and processes, IL Ciocco, Castelvecchio Pascoli Italy, June 30- July 11, 1986]
/ edited by R. A. Levy
Dordrecht
Boston
: Kluwer Academic
: Kluwer Academic
, 1989
, 1989
xiv, 985 p.
: ill
; 25 cm
NATO ASI Series. Series E, Applied Sciences
NATO ASI Series. Series E: Applied Sciences
; no, 164
; vol 164
English
Includes bibliographies
Microelectronics-- Materials-- Congresses
Integrated circuits-- very large scale integration-- Design and Construction-- Congresses
TK
7874
.
N339
1989
NATO advanced study institute on Microelectronic Materials and Processes (1986: IL Ciocco, Italy), author