عنوان
پدید آورنده
موضوع
رده
TK,7871,.S77,1997
TK
,
7871
,.
S77
,
1997
کتابخانه
محل استقرار
alk. paper)
0471138274 (cloth
IR
ebook37134
انگلیسی
IR
Chemical mechanical planarization of microelectronic materials
[Electronic Resource]
/ Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann
New York
: J. Wiley,
, c1997.
xiii, 324 p.
: ill. ; 24 cm.
e
Includes bibliographical references and index.
Microelectronics--Materials
Grinding and polishing.
TK
,
7871
,.
S77
,
1997
Steigerwald, Joseph M
Murarka, S. P
Gutmann, Ronald J
ایران
TK,7871,.S77,1997
9780471138273.pdf
0
old catalog
e
BL
1
a
Y
