عنوان
پدید آورنده
موضوع
رده
TK 7874 .E495 1986
TK
7874
.
E495
1986
کتابخانه
محل استقرار
IR
79773
انگلیسی
IR
Microlithography
[Book]
: Process technology for IC fabrication
/ David J. Elliott
New York
: McGraw - Hill Book Company
, 1989
xix, 378 p.
: illus, fig.
; 22 cm
انگليسي
Includes index
Integrated Circuits -- Very large scale integration -- Design and construction
Microlithography
Photoresists
TK
7874
.
E495
1986
Elliott
, David J
, author
Iran
Central Library Of Tehran University
Old cataloging
BL
1
Y
