عنوان
پدید آورنده
موضوع
رده
TK 7871.85 .I5834 2002
TK
7871
.
85
.
I5834
2002
کتابخانه
محل استقرار
خریداری
0965157776 0965157784
02BL0000000010519
انگلیسی
2002 7th International Symposium on Plasma- and Process-Induced Damage
Terence Hook, Koji Eriguchi, and Calvin T. Gabriel, editors ; technical co-sponsors, AVS, IEEE/Electron Devices Society, Japanese Society of Applied Physics
Santa Clara, California
AVS
,c2002
]6[, i, 177 p. ill. 28 cm.
June 5-7, 2002, Maui, Hawaii, USA
غیرمرجع
Includes bibliographic references and author index.
Semiconductor wafers- Congresses
Semiconductors- Effect of radiation on- Congresses
Plasma radiation- Congresses
TK
7871
.
85
.
I5834
2002
International Symposium on Plasma Process-Induced Damage)7th :2002 :Maui, Hawaii(
Some previous Symposia entitled: International Symposium on Plasma Induced-Damage.
"P?p2?sID"--Cover.
"IEEE Catalog Number )softbound( 02TH8582 ; IEEE Catalog Number )CD-ROM( 02TH8582C"--verso of T.p.
AU
AU
AU
AU
AU
AU
Hook, Terence.
Eriguchi, Koji.
Gabriel, Calvin T.
American Vacuum Society.
IEEE Electron Devices Society.
Oyo Butsuri Gakkai.
