عنوان
پدید آورنده
موضوع
رده
TA 1775 .E93
TA
1775
.
E93
کتابخانه
محل استقرار
EUV, X-ray, and neutron optics and sources :21-23 July 1999, Denver, Colorado
Bellingham, Wash.
SPIE
c1999
x, 394 p.: ill
SPIE proceedings series; v.7673
Includes bibliographies
ISBN: 0819432539
Carolyn A. MacDonald ... ]et al.[, chairs/editors; sponsored ... by SPIE--the International Society for Optical Engineering
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Congresses ، X-ray optics
Congresses ، Extreme ultraviolet lithography
Congresses ، Lithography, Electron beam
Congresses ، Ion beam lithography
Congresses ، Neutron sources
TA
1775
.
E93
TI
AU MacDonald, Carolyn Ann.
CO Society of Photo-optical Instrumentation Engineers
SE Proceedings of SPIE -- the International Society for Optical Engineering v.3767
