Semiconductor material and device characterization
[Book]
/ Dieter K. Schroder
3rd ed.
[Piscataway, NJ]
: IEEE Press ; Hoboken, N.J. : Wiley,
, c2006.
xv, 779 p. , ill. , 25 cm.
"Wiley-Interscience."
Electronic
Includes bibliographical references and index.
Resistivity -- Carrier and doping density -- Contact resistance and Schottky barriers -- Series resistance, channel length and width, and threshold voltage -- Defects -- Oxide and interface trapped charges, oxide thickness -- Carrier lifetimes -- Mobility -- Charge-based and probe characterization -- Optical characterization -- Chemical and physical characterization -- Reliability and failure analysis.