0849336821 (alk. paper)
IR
E-9446
انگلیسی
IR
Optical inspection of microsystems
[Book]
/ edited by Wolfgang Osten
Boca Raton, FL
: CRC/Taylor & Francis,
, c2007.
503 p., [8] p. of plates
: ill. (some col.)
; 27 cm.
(Optical science and engineering
; 109.)
Print - Electronic
Includes bibliographical references and index.
Optical science and engineering (Boca Raton, Fla.)
109
Quality control--Optical methods
Optical detectors--Industrial applications
Microelectronics.
670
.
42
.
5
TS156
.
2
.
O652
2007
Osten, Wolfgang
ایران
Optical inspection of microsystems
عادی
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