:international assessment of research and development
/ K.F. Ehmann ... [et al.]
Dordrecht
: Springer,
, c2007.
xxxiv, 362 p. , ill. , 25 cm.
"WTEC"--Cover.
Electronic
Includes bibliographical references.
1. Introduction / Richard E. DeVor and Kornel F. Ehmann -- 2. Design / Martin L. Culpepper and Thomas R. Kurfess -- 3. Materials / David Bourell and Kamlakar Rajurkar -- 4. Processes / Kamlakar Rajurkar and Marc Madou -- 5. Metrology, sensors and control / Thomas R. Kurfess and Thorn J. Hodgson -- 6. Non-lithography applications / Marc Madou -- 7. Business, education, the environment, and other issues / Thorn J. Hodgson -- App. A. Panelist biographies -- App. B. Questionnaire for site visits -- App. C. Site reports - Asia -- App. D. Site reports - Europe.
Micromanufacturing : international assessment of research and development