Ch. 4.6. Defect generation under electrical stress: experimental characterization and modelling / M. Houssa -- Sect. 5. Technological Aspects -- Ch. 5.1. Device integration issues / E. W. A. Young and V. Kaushik -- Ch. 5.2. Device architectures for the nano-CMOS era / S. Deleonibus -- Ch. 5.3. High-[kappa] transistor characteristics / J. C. Lee and K. Onishi -- App. Properties of High-[kappa] Materials.
Sect. 1. Introduction -- Ch. 1.1. High-[kappa] gate dielectrics: why do we need them? / M. Houssa and Marc Heyns -- Sect. 2. Deposition Techniques -- Ch. 2.1. Atomic layer deposition / M. Ritala -- Ch. 2.2. Chemical vapour deposition / S. A. Campbell and R. C. Smith -- Ch. 2.3. Pulsed laser deposition of dielectrics / D. Blank, L. Doeswijk, K. Karakaya, G. Koster and G. Rijnders -- Sect. 3. Characterization -- Ch. 3.1. Oxygen diffusion / R. M. C. de Almeida and I. J. R. Baumvol -- Ch. 3.2. Defects in stacks of Si with nanometre thick high-[kappa] dielectric layers: characterization and identification by electron spin resonance / A. Stesmans and V. V. Afanas'ev -- Ch. 3.3. Band alignment at the interface of Si and metals with high-permittivity insulating oxides / V. V. Afanas'ev and A. Stesmans -- Ch. 3.4. Electrical characterization, modelling and simulation of MOS structures with high-[kappa] gate stacks / J. L. Autran, D. Munteanu and M. Houssa -- Sect. 4. Theory -- Ch. 4.1. Defects and defect-controlled behaviour in high-[kappa] materials: a theoretical perspective / M. Stoneham, A. Shluger, A. Foster and M. Szymanski -- Ch. 4.2. Chemical bonding and electronic structure of high-[kappa] transition metal dielectrics: applications to interfacial band offset energies and electronically active defects / G. Lucovsky and J. Whitten -- Ch. 4.3. Electronic structure and band offsets of high dielectric constant gate oxides / J. Robertson and P. W. Peacock -- Ch. 4.4. Reduction of the electron mobility in high-[kappa] MOS systems caused by remote scattering with soft interfacial optical phonons / M. V. Fischetti, D. A. Neumayer and E. Cartier -- Ch. 4.5. Ab initio calculations of the structural, electronic and dynamical properties of high-[kappa] dielectrics / G. M. Rignanese, X. Gonze and A. Pasquarello --
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Gate array circuits , Materials
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