9780470596975 (cloth)
IR
E-3973
انگلیسی
IR
Computational lithography
[Book]
/ Xu Ma and Gonzalo R. Arce
Hoboken, N.J.
: Wiley
, 2010.
xv, 226 p. , ill. , 25 cm.
(Wiley series in pure and applied optics.)
Print
Includes bibliographical references (p. 217-222) and index.
Wiley series in pure and applied optics
Microlithography, Mathematics
Integrated circuits, Design and construction, Mathematics
Photolithography, Mathematics
Semiconductors, Etching, Mathematics
Resolution (Optics)
TK7872
.
M3M3
2010
Ma, Xu,1983-
Arce, Gonzalo R
ایران
Computational lithography Xu Ma and Gonzalo R. Arce
عادی
عادی
E-3973.pdf
3980025
مختارزاده
متن
0
E-3973
انگلیسی
old catalog
p
BL
1
a
Y
