عنوان
پدید آورنده
موضوع
رده
TK7836 .M525 2007
TK7836
.
M525
2007
کتابخانه
محل استقرار
9780824790
0824790243
IR
EB10640
انگلیسی
IR
Microlithography
[Electronic Resource]
:science and technology
/ edited by Kazuaki Suzuki, Bruce W. Smith
2nd ed.
Boca Raton
: CRC Press,
, c2007.
848 p. ill. 27 cm.
(Optical science and engineering
; 126)
e
ng
Includes bibliographical references and index.
Optical science and engineering (Boca Raton, Fla.)
126
Microlithography- Industrial applications
Integrated circuits- Masks
Metal oxide semiconductors, Complementary- Design and construction
Manufacturing processes
621
.
3815
.
31
TK7836
.
M525
2007
Suzuki, Kazuaki
Smith, Bruce W.,1959-
ایران
0824790243.pdf
محرمانه
محرمانه
0824790243.pdf
0
متن
old catalog
e
BL
1
a
Y
