عنوان
پدید آورنده
موضوع
رده
TK 7872 .M3 N3613
TK
7872
.
M3
N3613
کتابخانه
محل استقرار
Nano-lithography
London, UK
Hoboken, NJ
Wiley
ISTE
c2011
xxv, 325 p. : ill
Includes bibliographical references and index
edited by Stefan Landis
Ch. 1. X-ray lithography : fundamentals and applications -- ch. 2. NanoImprint lithography -- ch. 3. Lithography techniques using scanning probe microscopy -- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures -- ch. 5. Patterning with self-assembling block copolymers -- ch. 6. Metrology for lithography
Nanolithography
، Nanolithography
TK
7872
.
M3
N3613
TI
AU Landis, Stefan
