Silicon-on-insulator its technology and applications
Tokyo
KTK Scientific Publishers ; : Boston : Sold and distributed in the U.S.A. and Canada by Kluwer Academic Publishers
1985
viii, 295 p. : ill. ; 24 cm
Papers presented during the US-Japan Seminar on 'Solid Phase Epitaxy and Interface Kinetics' held in Oiso, Japan, June 20-24, 1983 ... co-sponsored by National Science Foundation and Japan Society for the Promotion of Science--P. 5
Includes bibliographies and index.
edited by S. Furukawa
1
، Solid state electronics -- Congresses
، Integrated circuits -- Design and construction -- Congresses
، Silicon -- Congresses
، Epitaxy -- Congresses
، Silicon-on-insulator technology
TK
7871
.
85
.
S548
TI
AU Furukawa, S. )Seijiro(, 1934-
AU US-Japan Seminar on Solid Phase Epitaxy and Interface Kinetics )1983 : Oiso-machi, Japan(