عنوان
پدید آورنده
موضوع
رده
TK 7874 .M4876 1997
TK
7874
.
M4876
1997
کتابخانه
محل استقرار
CE
Micromechanics and MEMS : classic and seminal papers to 1990
New York
IEEE Press
1997
xv, 701 p. : ill
"A selected reprint volume."
Includes bibliographical references and indexes
Microelectronics
Electromechanical devices
Micromechanics
Actuators
TK
7874
.
M4876
1997
TI
edited by William Trimmer
English
