عنوان
پدید آورنده
موضوع
رده
TK 7874.76 .U57 1996
TK
7874
.
76
.
U57
1996
کتابخانه
محل استقرار
CE
ULSI technology
New York
McGraw-Hill
1996
xxv, 726 p.: ill
McGraw-Hill series in electrical and computer engineering
McGraw-Hill International editions-cover
Includes bibliographies and index
Integrated circuits - Ultra large scale integration
Metallic films
Lithography
Electrochemical metallizing
TK
7874
.
76
.
U57
1996
TI
edited by C.Y. chang, S.M. Sze
