عنوان
پدید آورنده
موضوع
رده
TK 7871.15 .P6 P635 1989
TK
7871
.
15
.
P6
P635
1989
کتابخانه
محل استقرار
CE
Polymers in microlithography : materials and processes
Washington, DC
American Chemical Society
1989
xii, 449 p. : ill
ACS symposium series, 412
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
Includes bibliographical references and indexes
Polymers - Congresses
Photoresists - Congresses
Microlithography - Materials - Congresses
TK
7871
.
15
.
P6
P635
1989
TI
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor
English
