عنوان
پدید آورنده
موضوع
رده
TK7874 .D47 2011
TK7874
.
D47
2011
کتابخانه
محل استقرار
3642129021
364212903X
9783642129025
9783642129032
9783642129025
b733302
Design and manufacturing of active microsystems /
[Book]
Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, Editors.
New York :
Springer,
©2011.
1 online resource (xii, 444 pages) :
color illustrations
Microtechnology and MEMS
Includes bibliographical references and index.
pt. 1. Design and construction -- pt. 2. Guiding and measuring in active microsystems -- pt. 3. Manufacturing and fabrication -- pt. 4. Microassembly -- pt. 5. Industrial applications.
0
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
Springer
978-3-642-12902-5
Design and manufacturing of active microsystems.
Microtechnology.
Chimie.
Microtechnology.
Science des matériaux.
TECHNOLOGY & ENGINEERING-- Electronics-- Digital.
TECHNOLOGY & ENGINEERING-- Electronics-- Microelectronics.
TDPB
TEC-- 008060
TEC-- 008070
621
.
381
22
TK7874
.
D47
2011
Burisch, Arne.
Büttgenbach, S., (Stephanus),1945-
Hesselbach, Jürgen.
20201203180213.0
pn
مطالعه متن کتاب [Book]
Y
