عنوان

Contamination-free manufacturing for semiconductors and other precision products /

0824703804

9780824703806

b701822

Contamination-free manufacturing for semiconductors and other precision products /

[Book]

edited by Robert P. Donovan.

New York :

Marcel Dekker,

2001.

x, 448 pages :

illustrations ;

24 cm

Includes bibliographical references and index.

National technology roadmap for semiconductors : basis and alignment / David Jensen -- Off-wafer measurement of contaminants / Robert P. Donovan -- On-wafer measurement of particles / Rodolfo E. Díaz, Brent M. Nebeker, and E. Dan Hirleman -- On-wafer measurement of molecular contaminants / Victor K.F. Chia and Michael J. Edgell -- Transport and deposition of aerosol particles / Anthony S. Geller and Daniel J. Rader -- Particulate deposition in liquid systems / Deborah J. Riley -- Deposition of molecular contaminants in gaseous environments / Allyson L. Hartzell -- Organic contamination removal / Steven Verhaverbeke and Kurt Christenson -- Deposition of metallic contaminants from liquids and their removal / Steven Verhaverbeke -- Sources of contamination and their control / David Jensen.

0

Semiconductors-- Defects.

Semiconductors-- Design and construction.

CONTAMINANTS.

CONTAMINATION.

DEFECTS.

DESIGN.

Fertigung

Halbleitertechnologie

MANUFACTURING.

PRECISION.

SEMICONDUCTOR DEVICES.

SEMICONDUCTORS (MATERIALS)

Semiconductors-- Defects.

Semiconductors-- Design and construction.

Donovan, R. P.

20201207172758.0

[Book]

Y