1 Introduction to electron beam instruments --; 1.1 Introduction --; 1.2 Basic properties of electron emitters --; 1.3 Electron optics, electron lenses and deflection systems --; References --; 2 Electron-specimen interactions --; 2.1 Introduction --; 2.2 Elastically scattered electrons --; 2.3 Inelastically scattered electrons --; 2.4 Generation of X-rays --; 2.5 Generation of Auger electrons --; 2.6 Generation of electron beam induced current and cathodoluminescence signals --; References --; 3 Layout and operational modes of electron beam instruments --; 3.1 Transmission electron microscopy --; 3.2 Scanning electron microscopy --; 3.3 Scanning transmission electron microscopy --; 3.4 Auger electron spectroscopy --; 3.5 Electron microprobe analysis --; 3.6 X-ray spectrometers --; 3.7 Electron spectrometers --; References --; 4 Interpretation of diffraction information --; 4.1 Introduction --; 4.2 Analysis of electron diffraction patterns --; 4.3 Interpretation of diffraction maxima associated with phase transformations and magnetic samples --; 4.4 Interpretation of diffraction patterns from twinned crystals --; 4.5 Interpretation of channelling patterns and backscattered electron patterns in scanning electron microscopy --; References --; 5 Analysis of micrographs in TEM, STEM, HREM and SEM --; 5.1 Introduction --; 5.2 Theories of diffraction contrast in transmission electron microscopy --; 5.3 Analysis of images in transmission electron microscopy --; 5.4 Influence of electron optical conditions on images in TEM and STEM --; 5.5 Interpretation of high resolution electron microscopy images --; 5.6 Interpretation of scanning electron microscopy images --; References --; 6 Interpretation of analytical data --; 6.1 Interpretation of X-ray data --; 6.2 Interpretation of data from thin samples --; 6.3 Interpretation of X-ray data from bulk samples --; 6.4 Interpretation of electron energy loss spectra --; 6.5 Interpretation of Auger spectra --; 6.6 Spatial resolution of analysis --; References --; Appendix A The reciprocal lattice --; Appendix B Interplanar distances and angles in crystals. Cell volumes. Diffraction group symmetries --; Appendix C Kikuchi maps, standard diffraction patterns and extinction distances --; Appendix D Stereomicroscopy and trace analysis --; Appendix E Tables of X-ray and EELS energies.
The examination of materials using electron beam techniques has developed continuously for over twenty years and there are now many different methods of extracting detailed structural and chemical information using electron beams. These techniques which include electron probe microanalysis, trans mission electron microscopy, Auger spectroscopy and scanning electron microscopy have, until recently, developed more or less independently of each other. Thus dedicated instruments designed to optimize the performance for a specific application have been available and correspondingly most of the available textbooks tend to have covered the theory and practice of an individual technique. There appears to be no doubt that dedicated instru ments taken together with the specialized textbooks will continue to be the appropriate approach for some problems. Nevertheless the underlying electron-specimen interactions are common to many techniques and in view of the fact that a range of hybrid instruments is now available it seems appropriate to provide a broad-based text for users of these electron beam facilities. The aim of the present book is therefore to provide, in a reasonably concise form, the material which will allow the practitioner of one or more of the individual techniques to appreciate and to make use of the type of information which can be obtained using other electron beam techniques.