edited by Ludwig Treitinger, Mitiko Miura-Mattausch.
Berlin, Heidelberg
Springer Berlin Heidelberg
1988
(ix, 167 pages 125 illustrations)
Springer series in electronics and photonics, 27.
History, Present Trends, and Scaling of Silicon Bipolar Technology --; Self-Aligning Technology for Sub-100nm Deep Base Junction Transistors --; Vertical Scaling Considerations for Polysilicon-Emitter Bipolar Transistors --; Trench Isolation Schemes for Bipolar Devices: Benefits and Limiting Aspects --; A Salicide Base Contact Technology (SCOT) for Use in High Speed Bipolar VLSI --; Advanced Self-Alignment Technologies and Resulting Structures of High-Speed Bipolar Transistors --; Trends in Heterojunction Silicon Bipolar Transistors --; Molecular Beam Epitaxy of Silicon-Based Bipolar Structures --; Subject Index.
This book presents an overview of important current and (near) future developments of high-performance bipolar devices and the corresponding technologies. It is written by foremost experts who are themselves engaged in the developments within the leading companies, thus giving the most up-to-date results. The reviews presented here show clearly that there remains a large potential for further progress in this field. This progress is characterized by the demands for higher speed and lower power consumption for single-chip systems. It is also apparent that a large part of this potential can be realized by rather unsophisticated techniques and configurations well suited to uncomplicated transfer to fabrication. The book is written in a style that should be understandable not only to experts but also to newcomers to the bipolar field.
Electronics.
Optical materials.
Surfaces (Physics)
TK7871
.
96
.
B55
E358
1988
edited by Ludwig Treitinger, Mitiko Miura-Mattausch.