عنوان
پدید آورنده
موضوع
رده
TJ1191.5 B976 2004
TJ1191
.
5
B976
2004
کتابخانه
محل استقرار
1402080212
9781402080210
b554133
An Introduction to Surface-Micromachining
[Book]
by Robert W. Johnstone, M. Parameswaran.
Boston, MA
Springer US
2004
(xiii, 189 pages)
1. Introduction --;1.1 Why miniaturize? --;1.2 Why surface-micromachining? --;1.3 History --;References --;I Fabrication --;2. Microfabrication Processes --;3. Micromachining Technologies --;II Design --;4. Microscale Physics --;5. Mechanics --;6. Design Rules --;7. Non-Ideal Processes --;8. Design Techniques --;III Devices --;9. Electrical Components --;10. Mechanical Components --;11. Electrostatic Actuators --;12. Electro-Thermal-Compliant Actuators --;13. Raised Structures --;IV Processes --;14. PolyMUMPsTM Process --;15. SUMMiTTM Process --;16. MUSiC® Process.
Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components.
Computer engineering.
Engineering.
Mechanical engineering.
TJ1191
.
5
B976
2004
by Robert W. Johnstone, M. Parameswaran.
M Parameswaran
Robert W Johnstone
مطالعه متن کتاب [Book]
Y
