عنوان

Digital holography for MEMS and microsystem metrology

9780470978696 (cloth)

9781119972785 (ePub)

9781119972792 (Mobi)

9781119997290 (oBook)

9781119997306 (e-book)

9781119997306 (ePDF)

b502416

Digital holography for MEMS and microsystem metrology

[Book]

edited by Anand Asundi.

Hoboken, N.J. :

Wiley,

2011.

xxii, 205 p. :

ill., port.

The Wiley microsystem and nanotechnology series.

Includes bibliographical references and index.

Access may be limited to ebrary affiliated libraries.

Holographic testing.

Image processing-- Digital techniques.

Microelectromechanical systems-- Measurement.

Microelectronics-- Measurement.

621

381

TK7875

D54

2011eb

Asundi, Anand.

ebrary, Inc.

[Book]