Database needs for modeling and simulation of plasma processing
[Book]
Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Washington, D.C. :
National Academy Press,
1996.
64 p. ;
28 cm.
The compass series.
Includes bibliographical references.
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