عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
0852960395
dltt
Silicon wafer bonding technology :
[Book]
for VLSI and MEMS applications /
edited by Subramanian S. Iyer and Andre J. Auberton-Hervé
London :
Institution of Electrical Engineers,
c2002
xxv, 149 p. :
ill. ;
26 cm
EMIS processing series ;
no. 1
Includes bibliographical references and index
Integrated circuits-- Very large scale integration
Microelectromechanical systems
Silicon-on-insulator technology
621
.
38152
21
Auberton-Hervé, Andre J
Iyer, Subramanian S
INSPEC., EMIS Group
Institution of Electrical Engineers
20030630095434.0
مطالعه متن کتاب [Book]
Y
