عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
9780323352888
9780323327374
dltt
Electrochemical micromachining for nanofabrication, MEMS and nanotechnology
[Book]
Bijoy Bhattacharyya, Production Engineering Department, Jadavpur University, Kolkata, India.
1 online resource :
illustrations
Includes bibliographical references and index.
This book describes electrochemical micromachining (EMM). It covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications; explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM; describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT). --
Microelectromechanical systems.
Micromachining.
Nanotechnology.
Bhattacharyya, Bijoy
Books24x7, Inc.
20151102142400.0
pn
مطالعه متن کتاب [Book]
Y
