Microstructure Technology for Optical Component Fabrication -- Microlithographic Pattern Generation for Optics -- Modeling of Free-Space Microoptics -- Modeling of Photonic Waveguides and Circuits -- Modeling of Waveguide-Optical Devices by the Method of Lines -- Microoptics Using the LIGA Technology -- Modular Fabrication Concept for LIGA-Based Microoptics -- Fabrication of Optical Waveguides in Dielectrics by Femtosecond Laser Pulses -- Integrated Planar Erbium-Doped Waveguide Amplifiers: Technological and Optical Considerations -- Two-Dimensional Photonic Crystal Waveguides -- Interferometric Measurement of Microlenses Including Cylindrical Lenses -- The Integrated Microlens: The Development of Vertical and Horizontal Integration -- Planar-Integrated Free-Space Optics: From Components to Systems -- Microoptical Structures for Semiconductor Light Sources -- Microoptic Sensors -- Fiber-Optic Gyros and MEMS Accelerometers -- Microoptical Applications in Spectrally Encoded Fiber Sensor Systems -- Microoptical Beam Shaping for Supershort-Pulse Lasers.
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The continuing trend towards miniaturisation and integration, well-known from electronics, is also a significant factor for optical system development. Many novel applications depend on the availability of suitable components and (sub-)systems that offer features like small size, low cost, robustness, capability for integration with other technologies, etc. This is what micro-optics is about. For more than 20 years, there has been constant improvement in the area of micro-optics. The purpose of this book is to provide an overview of the latest activities on fabrication technology, modelling and design, systems integration and applications. The book brings together contributions from different areas of micro-optics to describe the status of their work. Configurations based on both, wave-guide and free-space optics are covered. The reader can expect up-to-date information with many new results. The book is intended for graduate students, teachers as well as researchers in industry. Key features: - offers a state of the art look at fabrication techologies for micro-optics - provides scientific background and modelling of optics at the micro-scale - looks at techniques for measuring micro-optical component properties - includes various concepts and demonstrations for micro-optical systems