عنوان

Nanolithography

9780857098757

9780857095008

b401931

Nanolithography

[Book]

the art of fabricating nanoelectronic and nanophotonic devices and systems /

[edited by] Martin Feldman.

1 online resource :

illustrations.

Woodhead Publishing series in electronic and optical materials ;

number 42

Includes bibliographical references and index.

Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. The goal of this book is to give enough background information to enable researchers to understand and appreciate new developments in nanolithography, and to go on to make advances of his/her own. Topics include: current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions; lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography; emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics. --

Nanoelectronics.

Nanoimprint lithography.

Nanolithography.

Nanophotonics.

Feldman, Martin

Books24x7, Inc.

20151201155900.0

pn

[Book]

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