عنوان
پدید آورنده
موضوع
رده
کتابخانه
محل استقرار
0819490938
9780819490933
9780819490926
b401802
Introduction to semiconductor manufacturing technology
[Book]
Hong Xiao.
2nd ed.
Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
2012.
1 online resource (xix, 656 p.) :
ill., digital file.
SPIE Press monograph ;
PM220
"SPIE Digital Library."--Website.
Preface to the first edition -- Preface to the second edition -- Chapter 1. Introduction -- Chapter 2. Introduction to integrated circuit fabrication -- Chapter 3. Semiconductor basics -- Chapter 4. Wafer manufacturing, epitaxy, and substrate engineering -- Chapter 5. Thermal processes -- Chapter 6. Photolithography -- Chapter 7. Plasma basics -- Chapter 8. Ion implantation -- Chapter 9. Etch -- Chapter 10. Chemical vapor deposition and dielectric thin films -- Chapter 11. Metallization -- Chapter 12. Chemical mechanical polishing -- Chapter 13. Process integration -- Chapter 14. Integrated circuit processing technologies -- Chapter 15. Future trends and summary.
0
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations.
Mode of access: World Wide Web.
9780819490926
Integrated circuits-- Design and construction.
Semiconductor industry.
Semiconductors-- Design and construction.
Xiao, Hong.
Society of Photo-optical Instrumentation Engineers.
20130726162351.0
مطالعه متن کتاب [Book]
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