عنوان

Handbook of VLSI microlithography

0815514441

0815517793 (electronic bk.)

1591242754 (electronic bk.)

9780815514442

9780815517795 (electronic bk.)

9781591242758 (electronic bk.)

9780815517801

b393750

Handbook of VLSI microlithography

[Book]

principles, technology, and applications /

edited by John N. Helbert.

2nd ed.

Norwich, N.Y. :

William Andrew Pub.,

c2001.

1 online resource (xxi, 1001 p.) :

ill.

Materials science and process technology series. Electronic materials and process technology.

Includes bibliographical references and index.

Issues and Trends Affecting Lithography Tool Selection Strategy -- Resist Technology: Design, Processing and Applications -- Lithography Process Monitoring and Defect Detection -- Techniques and Tools for Photo Metrology -- Techniques and Tools for Optical Lithography -- Microlithography Tool Automation -- Electron Beam ULSI Applications -- Rational Vibration and Structural Dynamics for Lithographic Tool Installations -- Applications of Ion Microbeam Lithography and Direct Processing -- X-Ray Lithography.

0

This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge, and pattern feature dimension control. The book's explanation of resist and resist process equipment technology describes the relationship between the resist process and equipment parameters. The basics of resist technology are also covered - including an entire chapter on resist process defectivity and the potential yield limiting effect on device production.

Elsevier Science & Technology

153814:153974

Handbook of VLSI microlithography.

0815514441

Integrated circuits-- Very large scale integration.

Microlithography.

Helbert, John N.

Knovel (Firm)

20131119105434.0

[Book]

Y