عنوان
پدید آورنده
موضوع
رده
TK 7871 .85 .A33 2016
TK
7871
.
85
.
A33
2016
کتابخانه
محل استقرار
electronic
Advances in chemical mechanical planarization )CMP(
xxiii, 511 pages : illustrations ; 24 cm
Woodhead Publishing series in electronic and optical materials ;no. 68.
Includes bibliographical references and index
edited by Suryadevara Babu
، Chemical mechanical planarization
، Nanoelectronics
، Microelectronics
، Chemical mechanical planarization
، Microelectronics
، Nanoelectronics
TK
7871
.
85
.
A33
2016
TI
AU Babu, Suryadevara V editor
SE
SE Woodhead Publishing series in electronic and optical materials
