52010
Feedback control of MEMS to atoms
New York
Springer
c2012
viii, 384 p. : ill.
Includes bibliographical references and index
Jason J. Gorman, Benjamin Shapiro, editors
، Feedback control systems
، Microelectromechanical systems
، Microelectronics
629
.
8312
TJ
216
.
F443
2012
TI
AU Gorman, Jason J
AU Shapiro, Benjamin 1973- .
CL
