17458
Mechanics and physics of precise vacuum mechanisms
Dordrecht; New York
Springer
c2010
xiv, 234 p. : ill
Fluid mechanics and its applications
v.91
Includes bibliographical references
E. A. Deulin ... ]et al.[
، Vacuum technology
TJ
940
.
M43
2010
TI
AU Deulin, E. A.
SE
CL
