24022
MEMS mechanical sensors
Boston
Artech House
c2004
x, 269p.: ill
Artech House microelectrochemical series
Includes biblographical references and index
Stephen Beeby...]et al.[
، Microelectromechanical systems
، Detectors
TK
7875
.
M4537
2004
TI
AU Beeby, Stephen
SE
CL
