24049
Hsu, Tai-Ran
MEMS & microsystems: design and manufacture
Boston
McGraw-Hill
c2002
xii, 436p.: ill
Bibliography p.: 427-431
Includes index
Tai-Ran Hsu
، Microelectronics
، Microelectromechanical systems
، Microelectronic packaging
TK
7874
.
H794
2002
AU
TI
CL
