24027
MEMS packaging
London
Institution of Electrical Engineers
c2004
xxix, 275p.: ill
EMIS processing series
no.3
Includes biblographical references and index
edited by Tai-Ran Hsu
، Microelectromechanical systems
، Microelectronic packaging
TK
7874
.
M46
2004
TI
AU Hsu, Tai-Ran
SE
CL
