58768
Elwenspoek, Miko
8491-
Mechanical microsensors
Berlin
Springer
c2001
x, 295p.: ill
Microtechnology and MEMS
Includes bibliographical references and index
M. Elwenspoek, R. Wiegerink
Design and construction ، Detectors
Design and construction ، Microelectromechanical systems
، Transducers
، Silicon
، Micromachining
TK
7875
.
E49
2001
AU
AU Wiegerink, Remco J. 1964- .
TI
SE
CL
