15856
59586
Jaeger, Richard C.
Introduction to Microelectronic fabrication
Reading, Mass
Addison-Wesley Pub. Co.
c1988
xiii, 232p.:ill
Modular series on solid state devices; v.5
Includes index
Richard C. Jaeger
Very large scale integrated - Design and construction - Congresses ، Integrated circuits
TK
7874
.
J33
1988
AU
TI
SE
CL
CL
