عنوان

Handbook of physical vapor deposition )PVD( processing : film formation, adhesion, surface preparation and contamination control

electronic

Mattox, D. M.

Handbook of physical vapor deposition )PVD( processing : film formation, adhesion, surface preparation and contamination control

Westwood, N.J.

Noyes Publications,

1998

xxvii, 917 p. ill. 24 cm.

ISBN: 0815514220

Includes bibliographical references and index.

Publisher description http://www.loc.gov/catdir/description/wap041/97044664.html

Table of contentshttp://www.loc.gov/catdir/toc/wap041/97044664.html

by Donald M. Mattox

، Physical vapor deposition- Handbooks, manuals, etc

695

M38

1998